Year of publication
Type of media
Source
Type of material
Licence
Language
TIB reading rooms collection
1–20 of 137 hits
Sort by:
Sort by:
-
Nanoimprint lithography : principles, processes and materials
TIBKAT | 2011|Keywords: Microlithography -
Mask and Lithography Conference (EMLC), 2009 25th European : date, 12-15 Jan. 2009
TIBKAT | 2009|Keywords: Microlithography -
Handbook of microlithography, micromachining, and microfabrication : volume 1: microlithography
TIBKAT | 1997|Keywords: Microlithography -
Nanoimprint lithography : an enabling process for nanofabrication
TIBKAT | 2013|Keywords: Microlithography -
Mask and Lithography Conference (EMLC), 2007 23rd European : date, 22-26 Jan. 2007
TIBKAT | 2007|Keywords: Microlithography -
Microprocesses and nanotechnology, 2007 : digest of papers ; 2007 International Microprocesses and Nanotechnology Conference, MNC 2007 ; November 5 - 8, 2007 (November 5 technical seminar, 6 - 8 conference), Kyoto International Conference Center, Kyoto, Japan
TIBKAT | 2007|Keywords: Microlithography -
Microprocesses and nanotechnology 2007 : digest of papers ; 2007 International Microprocesses and Nanotechnology Conference, [MNC 2007] ; November 5 - 8, 2007 (November 5 technical seminar, 6 - 8 conference), Kyoto International Conference Center, Kyoto, Japan
TIBKAT | 2007|Keywords: Microlithography -
Mask and Lithography Conference (EMLC), 2006 22nd European : date, 23-26 Jan. 2006
TIBKAT | 2006|Keywords: Microlithography -
20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12 - 14 January 2004, Dresden, Germany
TIBKAT | 2004|Keywords: Microlithography
Send my search to (beta)
Send your search query (search terms without filters) to other databases, portals and catalogues to find more interesting hits.
Dimensions:
full data search
or
title and abstract search
Dimensions is a database for abstracts and citations that links information on research funding with the resulting publications, studies and patents.
TIB AV portal
In the TIB AV-Portal, audiovisual media from science and teaching can be foundand own scientific videos can be published.
Specialised Information Service for Mobility and Transport Research (FID move)
Open Research Knowledge Graph (ORKG)
The FID move can be used to search for subject-specific literature, research data and other information from mobility and transport research.
The Open Research Knowledge Graph provides structured descriptions of research content and makes it comparable.
Common Union Catalogue (GVK)
Freely accessible part of the collaborative K10plus catalogue with materials relevant for interlibrary loan and direct delivery services.